Method for the production of an aluminium nitride substrate

• Main Authors: JARRIGE, JEAN, PETITBON, M. ALAIN, FERRATO, M. MARC
• Format: Patent
• Language: English; French; German
• Published: 12.05.2004
• Edition: 7
• Subjects: ARTIFICIAL STONE; BASIC ELECTRIC ELEMENTS; CEMENTS; CERAMICS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS; CONCRETE; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; LIME, MAGNESIA; METALLURGY; PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS; REFRACTORIES; SEMICONDUCTOR DEVICES; SLAG; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; TREATMENT OF NATURAL STONE

Production of an aluminum nitride (AlN) substrate comprises spraying a powder at high temperature and high speed onto a support. The powder comprises AlN particles coated with an oxide precursor giving an oxide that forms a liquid phase around the AlN particles during spraying. Procédé de fabrication d'un substrat en nitrure d'aluminium AIN, caractérisé en ce que le substrat est obtenu par projection d'une poudre à haute température et à haute vitesse sur un élément support, ladite poudre comportant des grains d'AlN recouverts d'une couche d'un précurseur d'oxyde, ledit précurseur d'oxyde étant choisi parmi les précurseurs oxydes donnant un oxyde formant une phase liquide autour des grains d'AlN au cours de la projection.