FIXED ABRASIVE ARTICLE FOR USE IN MODIFYING A SEMICONDUCTOR WAFER
An abrasive article that includes a fixed abrasive element having a plurality of abrasive particles, a resilient element, and a plurality of rigid segments disposed between the fixed abrasive element and the resilient element.
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Main Author | |
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Format | Patent |
Language | English French German |
Published |
12.11.2003
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Edition | 7 |
Subjects | |
Online Access | Get full text |
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Abstract | An abrasive article that includes a fixed abrasive element having a plurality of abrasive particles, a resilient element, and a plurality of rigid segments disposed between the fixed abrasive element and the resilient element. |
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AbstractList | An abrasive article that includes a fixed abrasive element having a plurality of abrasive particles, a resilient element, and a plurality of rigid segments disposed between the fixed abrasive element and the resilient element. |
Author | GOETZ, DOUGLAS, P |
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Discipline | Medicine Chemistry Sciences |
DocumentTitleAlternate | ARTIKEL MIT FLIXIERTEM SCHLEIFMITTEL ZUM VERÄNDERN EINER HALBLEITERSCHEIBE ARTICLE A ABRASIF FIXE DESTINE A LA MODIFICATION D'UNE TRANCHE SEMI-CONDUCTRICE |
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Notes | Application Number: EP20010948459 |
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PublicationYear | 2003 |
RelatedCompanies | 3M INNOVATIVE PROPERTIES COMPANY |
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Snippet | An abrasive article that includes a fixed abrasive element having a plurality of abrasive particles, a resilient element, and a plurality of rigid segments... |
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SubjectTerms | BASIC ELECTRIC ELEMENTS DRESSING OR CONDITIONING OF ABRADING SURFACES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING PERFORMING OPERATIONS POLISHING SEMICONDUCTOR DEVICES TOOLS FOR GRINDING, BUFFING, OR SHARPENING TRANSPORTING |
Title | FIXED ABRASIVE ARTICLE FOR USE IN MODIFYING A SEMICONDUCTOR WAFER |
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