Chemical polishing of ferroelectric materials
A method of polishing ferroelectric materials and specifically perovskite materials and still more specifically barium strontium titanate wherein the surface to be polished is initially partially smoothened or planarized by mechanical abrading with final smoothening or planarization provided by a ch...
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Main Authors | , , |
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Format | Patent |
Language | English French German |
Published |
06.12.1995
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Edition | 6 |
Subjects | |
Online Access | Get full text |
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