Chemical polishing of ferroelectric materials

• Main Authors: BERATAN, HOWARD R, BELCHER, JAMES F, JOHNSON, PAUL O
• Format: Patent
• Language: English; French; German
• Published: 06.12.1995
• Edition: 6
• Subjects: ADHESIVES; ARTIFICIAL STONE; CEMENTS; CERAMICS; CHEMISTRY; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS; CONCRETE; DRESSING OR CONDITIONING OF ABRADING SURFACES; DYES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS; GRINDING; LIME, MAGNESIA; MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FORELSEWHERE; METALLURGY; MISCELLANEOUS APPLICATIONS OF MATERIALS; MISCELLANEOUS COMPOSITIONS; NATURAL RESINS; PAINTS; PERFORMING OPERATIONS; POLISHES; POLISHING; REFRACTORIES; SLAG; TRANSPORTING; TREATMENT OF NATURAL STONE

A method of polishing ferroelectric materials and specifically perovskite materials and still more specifically barium strontium titanate wherein the surface to be polished is initially partially smoothened or planarized by mechanical abrading with final smoothening or planarization provided by a chemical polishing with a polishing wheel using an acidic solution containing essentially the acid, hydrogen peroxide and water. Preferred acids are perchloric acid, acetic acid, nitric acid and combinations thereof.