Electret transducer array

An electret transducer array and fabrication technique are disclosed. The array comprises a foil having a layer of insulating material and a layer of metal in contact therewith. The layer of metal comprises one or more discrete areas of metal which define the active areas of one or more transducers...

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Bibliographic Details
Main Authors GOODWIN, MICHAEL MARK, WEST, JAMES EDWARD, ELKO, GARY WAYNE, KUBLI, ROBERT ALFRED
Format Patent
LanguageEnglish
French
German
Published 02.04.1997
Edition6
Subjects
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Summary:An electret transducer array and fabrication technique are disclosed. The array comprises a foil having a layer of insulating material and a layer of metal in contact therewith. The layer of metal comprises one or more discrete areas of metal which define the active areas of one or more transducers in the array. Electrical leads are coupled to the discrete areas of metal. By means of these leads, electrical signals produced by each transducer in response to incident acoustic signals may be accessed. The areas of metal may be formed by selectively removing metal from the foil, or by selective metal deposition. The layer of insulating material is electrostatically charged. The electret transducer array further comprises a porous backplate of sintered metal. The backplate further comprises a rough surface in contact with the layer of insulating material. The backplate serves as a common electrode for transducers of the array. A second backplate is provided positioned adjacent to the metal layer of the foil forming an air gap therewith. The second backplate provides, among other things, shielding from stray electromagnetic fields.
Bibliography:Application Number: EP19920311259