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Summary:A bistable deformable mirror device (DMD) pixel architecture is disclosed, wherein the torsion hinges are placed in a layer different from the torsion beam layer. This results in pixels which can be scaled to smaller dimensions while at the same time maintaining a large fractional active area, an important consideration for spatial light modulation and for bright, high-density displays such as are used in high-definition television applications.
Bibliography:Application Number: EP19910110512