Process for deposition of thin and very thin layers
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| Main Authors | , |
|---|---|
| Format | Patent |
| Language | English French German |
| Published |
21.09.1994
|
| Edition | 5 |
| Subjects | |
| Online Access | Get full text |
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| Author | GANTZ, THOMAS MAI, HERMANN NAT |
|---|---|
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| Discipline | Medicine Chemistry Sciences |
| DocumentTitleAlternate | Verfahren zur Abscheidung dünner und dünnster Schichten. Procédé de déposition des couches minces et ultra-minces. |
| Edition | 5 |
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| PublicationYear | 1994 |
| RelatedCompanies | FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V |
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| SubjectTerms | CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION |
| Title | Process for deposition of thin and very thin layers |
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