Wet etching of cured polyimide
Polyimide is etched by contacting the polyimide with an aqueous solution of a metal hydroxide followed by contact with an acid followed by contact with an aqueous solution of a metal hydroxide. Etching of chemically cured polyimide can be enhanced by employing a presoaking in hot water. Also, partia...
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Main Authors | , , , , , , , , |
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Format | Patent |
Language | English French German |
Published |
24.01.1990
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Subjects | |
Online Access | Get full text |
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