SELF-ALIGNED SEMICONDUCTOR DEVICES

• Main Author: HASKELL, JACOB, D
• Format: Patent
• Language: English; French; German
• Published: 14.05.1990
• Edition: 4
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

A novel process is provided for fabricating transistors (14), contacts (46s, 40g, 46d) and interconnections (46c) in a novel self-aligned configuration. The process of the invention permits higher packing densities, and allows feature distances to approach 0.5 mu m and lower. In a preferred embodime...