Für eine niedrige Biegekraft empfindliche Handhabevorrichtung

• Main Authors: KLOS, LEO V., NEWBURYPORT, MA 01950, US, HERTEL, RICHARD J., BRADFORD, MA 01830, US
• Format: Patent
• Language: German
• Published: 08.09.1994
• Edition: 5
• Subjects: BASIC ELECTRIC ELEMENTS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES; CONVEYING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; HAND TOOLS; HANDLING THIN OR FILAMENTARY MATERIAL; MANIPULATORS; PACKING; PERFORMING OPERATIONS; PNEUMATIC TUBE CONVEYORS; PORTABLE POWER-DRIVEN TOOLS; SEMICONDUCTOR DEVICES; SHOP CONVEYOR SYSTEMS; STORING; TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING; TRANSPORTING

A tactile pick includes a base and a lever attached beneath the base by a pivot. A load sensing device including a strain gauge is located between the base and the portion of the lever on one side of the pivot; the portion of the lever on the other side of the pivot is adapted to receive a semiconductor wafer. Rotation of the lever about the pivot induced by the weight of a wafer causes an actuator to depress a flexible member on which a strain gauge is mounted. The output signal of the strain gauge is processed by a controller to provide an output signal which varies monotonically with the magnitude of the weight placed on the wafer receiving portion of the lever. The pick is employed in connection with the wafer transport system which transfers wafers from a cassette to the pick lever.