Thin film production apparatus
The present invention relates to a thin film production apparatus for applying a thin film to a moving ribbon-shaped base material by vacuum deposition with feed of gas into a vacuum system. A vacuum chamber is provided which has an evaporation source. The apparatus further contains a transport mech...
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Main Authors | , |
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Format | Patent |
Language | English German |
Published |
30.01.1986
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Edition | 4 |
Subjects | |
Online Access | Get full text |
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