Thin film production apparatus
The present invention relates to a thin film production apparatus for applying a thin film to a moving ribbon-shaped base material by vacuum deposition with feed of gas into a vacuum system. A vacuum chamber is provided which has an evaporation source. The apparatus further contains a transport mech...
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Main Authors | , |
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Format | Patent |
Language | English German |
Published |
30.01.1986
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Edition | 4 |
Subjects | |
Online Access | Get full text |
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Summary: | The present invention relates to a thin film production apparatus for applying a thin film to a moving ribbon-shaped base material by vacuum deposition with feed of gas into a vacuum system. A vacuum chamber is provided which has an evaporation source. The apparatus further contains a transport mechanism for moving the ribbon-shaped base material through the vacuum chamber, at least one channel for feeding the gas into the vacuum chamber, a plurality of nozzles, which are arranged near the ribbon-shaped base material within the vacuum chamber, and a multi-stage gas branching mechanism which is arranged between the channel and the nozzles. |
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Bibliography: | Application Number: DE19853527259 |