Adjusting natural frequency of double axis oscillatory construction
The method relates to a construction (32) which has a first sprung element (36) with a longitudinal axis which coincides with a first axial direction along which an electrostatic force is applied and a second sprung element (34) with a longitudinal axis at 90 deg to the first axis. The width of the...
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Main Authors | , , |
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Format | Patent |
Language | English German |
Published |
28.11.1996
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Edition | 6 |
Subjects | |
Online Access | Get full text |
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