Adjusting natural frequency of double axis oscillatory construction

• Main Authors: CHO, YOUNG-HO, DAEJEON, KR, LEE, KI-BANG, SEOUL/SOUL, KR, SONG, CI-MOO, SUNGNAM, KYUNGKI, KR
• Format: Patent
• Language: English; German
• Published: 28.11.1996
• Edition: 6
• Subjects: BASIC ELECTRONIC CIRCUITRY; ELECTRICITY; GYROSCOPIC INSTRUMENTS; IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC ORINFRASONIC WAVES; MEASURING; MEASURING DISTANCES, LEVELS OR BEARINGS; NAVIGATION; PHOTOGRAMMETRY OR VIDEOGRAMMETRY; PHYSICS; RESONATORS; SURVEYING; TESTING

The method relates to a construction (32) which has a first sprung element (36) with a longitudinal axis which coincides with a first axial direction along which an electrostatic force is applied and a second sprung element (34) with a longitudinal axis at 90 deg to the first axis. The width of the second sprung element is smaller than that of the first and the construction has a solid section (37). The natural frequency of the construction in the first axial direction is measured and that of a third axial direction at 90 deg to the plane extending from the first and second axes. The thickness of the first element is altered to adjust the natural frequency relative to the third axial direction whilst maintaining the frequency relative to the first axial direction. The measurement steps and the alteration to the thickness are repeated until the natural frequencies relative to the first and third axial directions lie within a permitted tolerance band.