Clean room device for manufacturing or production process for chemical, pharmaceutical, biological, medical, electronics, micromechanics or optical applications with modelling of gas flow dependent on production system

• Main Authors: ROTH, KLAUS, SCHANZ, RAINER, FREDE, ANDREAS
• Format: Patent
• Language: English; German
• Published: 21.04.2005
• Edition: 7
• Subjects: AIR-CONDITIONING, AIR-HUMIDIFICATION, VENTILATION, USE OF AIRCURRENTS FOR SCREENING; BLASTING; CLEANING; CLEANING IN GENERAL; HEATING; LIGHTING; MECHANICAL ENGINEERING; PERFORMING OPERATIONS; PREVENTION OF FOULING IN GENERAL; RANGES; TRANSPORTING; VENTILATING; WEAPONS

The clean room device (1) has a work plate (4) provided with openings (6) and a gas feed (3) positioned above the work plate for directing a gas into the working zone (5) between the gas feed and the work plate, extracted via the openings in the latter. A device (9) is provided between the gas feed...