Verfahren zur Herstellung eines konformen Abstandselements benachbart zu einer Gateelektrodenstruktur

In a process for forming L-shaped sidewall spacers for a conducive line element, such as a gate electrode structure, the sacrificial spacers are formed of a material having a similar etch behavior as the material of the finally obtained L-shaped spacer, thereby improving tool utilization and reducin...

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Main Author SCHWAN, CHRISTOPH
Format Patent
LanguageGerman
Published 17.04.2008
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Abstract In a process for forming L-shaped sidewall spacers for a conducive line element, such as a gate electrode structure, the sacrificial spacers are formed of a material having a similar etch behavior as the material of the finally obtained L-shaped spacer, thereby improving tool utilization and reducing process complexity compared to conventional processes. In one particular embodiment, a spacer layer stack is provided having a first etch stop layer, a first spacer layer, a second etch stop layer, and a second spacer layer, wherein the first and second spacer layers are comprised of silicon nitride.
AbstractList In a process for forming L-shaped sidewall spacers for a conducive line element, such as a gate electrode structure, the sacrificial spacers are formed of a material having a similar etch behavior as the material of the finally obtained L-shaped spacer, thereby improving tool utilization and reducing process complexity compared to conventional processes. In one particular embodiment, a spacer layer stack is provided having a first etch stop layer, a first spacer layer, a second etch stop layer, and a second spacer layer, wherein the first and second spacer layers are comprised of silicon nitride.
Author SCHWAN, CHRISTOPH
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Snippet In a process for forming L-shaped sidewall spacers for a conducive line element, such as a gate electrode structure, the sacrificial spacers are formed of a...
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SubjectTerms BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
Title Verfahren zur Herstellung eines konformen Abstandselements benachbart zu einer Gateelektrodenstruktur
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