Movable mirror holder for use in photointerferometer used in measuring instruments, has coupling plate fitted with ends of both springs connected with movable mirror and base respectively at their other ends

• Main Authors: ISOZAKI, KATSUMI, NANKO, TOMOAKI, OTSUBO, MINORU, HAYASHI, HISANORI
• Format: Patent
• Language: English; German
• Published: 23.05.2001
• Edition: 7
• Subjects: MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PHYSICS; TESTING

Several springs (11a,11b) are arranged in parallel with predefined gap inbetween, on the base (10). A coupling plate (12) is fitted with one end of both springs. Other ends of the springs (11b) are connected to the movable mirror (4). Other ends of springs (11a) are connected to the base. Effective...