VERFAHREN DER ELEKTRONENSTRAHLLITHOGRAPHIE UND ELEKTRONENMIKROSKOPISCHEN INSPEKTION

• Main Authors: HELMSTREIT,WILFRIED,DD, KLEY,BERNHARD E.,DD, BIEDERMANN,WOLFGANG,DD, HOESSELBARTH,BERND,DD
• Format: Patent
• Language: German
• Published: 29.07.1981
• Edition: 3
• Subjects: APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL; BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; PERFORMING OPERATIONS; PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL; SEMICONDUCTOR DEVICES; SPRAYING OR ATOMISING IN GENERAL; TRANSPORTING