VERFAHREN ZUR MONITORIERUNG VON IN VAKUUMBESCHICHTUNGSPROZESSEN HERGESTELLTEN SCHICHTSYSTEMEN

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Bibliographic Details
Main Authors BEISTER,GUENTHER,DD, BUEDKE,EKKEHARD,DD, SIEBER,WOLFGANG,DD, ROTH,HERBERT,DD, ROEHNER,HANS-ULLRICH,DD
Format Patent
LanguageGerman
Published 04.07.1979
Edition2
Online AccessGet full text

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Author BUEDKE,EKKEHARD,DD
ROEHNER,HANS-ULLRICH,DD
BEISTER,GUENTHER,DD
SIEBER,WOLFGANG,DD
ROTH,HERBERT,DD
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Title VERFAHREN ZUR MONITORIERUNG VON IN VAKUUMBESCHICHTUNGSPROZESSEN HERGESTELLTEN SCHICHTSYSTEMEN
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