Chip cleaning machine

Disclosed is a wafer washer. A washing cylinder is arranged on a frame and a flange is arranged on the hemline of the washing cylinder. A cover body is pivoted on the upper edge of the washing cylinder. A rotary disc is arranged on the inner bottom of the washing cylinder. A motor is arranged on the...

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Bibliographic Details
Main Author YONGQING WU
Format Patent
LanguageEnglish
Published 25.06.2003
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
CLEANING
CLEANING IN GENERAL
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
PERFORMING OPERATIONS
PREVENTION OF FOULING IN GENERAL
SEMICONDUCTOR DEVICES
TRANSPORTING
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