Chip cleaning machine

• Main Author: YONGQING WU
• Format: Patent
• Language: English
• Published: 25.06.2003
• Edition: 7
• Subjects: BASIC ELECTRIC ELEMENTS; CLEANING; CLEANING IN GENERAL; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; PERFORMING OPERATIONS; PREVENTION OF FOULING IN GENERAL; SEMICONDUCTOR DEVICES; TRANSPORTING

Disclosed is a wafer washer. A washing cylinder is arranged on a frame and a flange is arranged on the hemline of the washing cylinder. A cover body is pivoted on the upper edge of the washing cylinder. A rotary disc is arranged on the inner bottom of the washing cylinder. A motor is arranged on the lower part of the washing cylinder. The flange arranged on the motor is integrated with the lower flange arranged on the hemline of the washing cylinder by a screw. The shaft end of motor output shaft is locked on the hemline of the rotary disc. A plurality of positioning bodies are symmetrically arranged on the surface of the rotary disc. A plurality of limit columns are symmetrically arranged on the edge of the rotary disc surface and a plurality of fixtures are arranged on the surface of the rotary disc. A groove which is to be inserted with wafer carrying discs is arranged on the center of each fixture. A groove hole is formed on the top surface of each fixture. A side flow through hole and a bottom flow through hole are respectively formed on the lateral and bottom surfaces of each fixture. An embedding body is arranged on an embedded groove which is formed by the lower edge of the end surface and the positioning body and the rotary disc. The wafer carrying disc can be directly inserted and positioned on the utility model which can be directly embedded and positioned on the rotary disc of the washing cylinder; thereby, the complex positioning process is avoided and the effect of convenient application is realized.