Dust removal device of vacuum coating equipment and vacuum coating equipment

• Main Authors: SHEN WEIZHENG, YU SHIHAO, XU JIANZHU, LOU GUOMING, ZHENG BOHONG
• Format: Patent
• Language: Chinese; English
• Published: 09.07.2024
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; CLEANING; CLEANING IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; PERFORMING OPERATIONS; PREVENTION OF FOULING IN GENERAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; TRANSPORTING

The utility model discloses a dust removal device of vacuum coating equipment and the vacuum coating equipment, the dust removal device comprises a base, a mounting chamber is arranged in the base, two opposite sides of the base are provided with a first opening and a second opening respectively, the first opening and the second opening are communicated with the mounting chamber, the openings face a motion path of a to-be-cleaned component, and the first opening is communicated with the mounting chamber. The second opening is used for being connected with negative pressure equipment; the cleaning brush is movably arranged in the mounting chamber, and at least one part of the cleaning brush extends out of the first opening; the driving mechanism is mounted on the base and is linked with the cleaning brush; the nozzle is installed on the base and located on the edge portion of the first opening, and the nozzle is used for being connected with positive pressure equipment. Compared with the prior art, the dust re