Vacuum nanoimprint device

The utility model relates to a vacuum nanoimprint device. The nanoimprint body comprises an imprint supporting seat used for supporting a substrate and a mask plate, an imprint power source used for providing imprint pressure and an imprint guiding mechanism used for imprint guiding, and when the su...

Full description

Saved in:
Bibliographic Details
Main Authors YAO YUAN, DUAN ZHONGWEI, WANG YUNXIANG, MA DONGYUE, XU AILING, ZHU CUIMEI
Format Patent
LanguageChinese
English
Published 12.03.2024
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
Online AccessGet full text

Cover

More Information
Summary:The utility model relates to a vacuum nanoimprint device. The nanoimprint body comprises an imprint supporting seat used for supporting a substrate and a mask plate, an imprint power source used for providing imprint pressure and an imprint guiding mechanism used for imprint guiding, and when the substrate and the mask plate are supported by the imprint supporting seat, the mask plate is located above the substrate; the imprinting power source comprises a telescopic corrugated pipe, the first end of the corrugated pipe is fixedly connected with the imprinting supporting seat, and the corrugated pipe can push the imprinting supporting seat to ascend until the substrate is attached to the mask plate under the action of the inflated positive pressure gas; and the impressing guide mechanism is used for guiding stretching of the corrugated pipe and lifting of the impressing supporting seat. According to the utility model, nanoimprint in a vacuum environment can be effectively met, and the uniformity and reliabilit
Bibliography:Application Number: CN202322208357U