Semiconductor etching workbench convenient to clean

• Main Authors: JEON JAE-HONG, YIN PEIYUN, CHEN XINXIN
• Format: Patent
• Language: Chinese; English
• Published: 18.08.2023
• Subjects: BASIC ELECTRIC ELEMENTS; CLEANING; CLEANING IN GENERAL; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; PERFORMING OPERATIONS; PREVENTION OF FOULING IN GENERAL; SEMICONDUCTOR DEVICES; TRANSPORTING

The utility model discloses a semiconductor etching workbench convenient to clean, which comprises a frame body, one side of the frame body is provided with an avoiding groove, the upper surface of the frame body is fixedly connected with two guide frames, one end of each guide frame is located in the avoiding groove, the two guide frames are both internally and movably connected with sliding blocks, and the sliding blocks are movably connected with the sliding blocks. One side of the sliding block is movably connected with a fluted disc, one side of the fluted disc is fixedly connected with a circular ring, one side of the sliding block is movably connected with an auxiliary gear, and the auxiliary gear is meshed with the fluted disc. According to the utility model, manual cleaning is not needed, the labor amount of workers is reduced, the time is saved, the cleaning convenience of the semiconductor etching workbench is improved, sweeps can be prevented from scattering on the ground, the cleaning efficiency