Patterned substrate and epitaxial structure thereof

• Main Authors: LU LING, SUN SHUAI, FU XINGXING
• Format: Patent
• Language: Chinese; English
• Published: 01.11.2022
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; NANOTECHNOLOGY; PERFORMING OPERATIONS; SEMICONDUCTOR DEVICES; SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; TRANSPORTING

The utility model relates to the field of semiconductors, and discloses a patterned substrate with a micro-nano structure and an epitaxial structure thereof, the patterned substrate comprises a substrate body (1), the surface of the substrate body (1) is provided with convex structures (101) which a...