Patterned substrate and epitaxial structure thereof

• Main Authors: LU LING, SUN SHUAI, FU XINGXING
• Format: Patent
• Language: Chinese; English
• Published: 01.11.2022
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; NANOTECHNOLOGY; PERFORMING OPERATIONS; SEMICONDUCTOR DEVICES; SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; TRANSPORTING

The utility model relates to the field of semiconductors, and discloses a patterned substrate with a micro-nano structure and an epitaxial structure thereof, the patterned substrate comprises a substrate body (1), the surface of the substrate body (1) is provided with convex structures (101) which are periodically arranged in a micron order, and an isolation groove (103) is arranged between every two adjacent convex structures (101). Nanoscale microstructures (102) which are integrated with the convex structures (101) and are made of the same material are uniformly distributed on the whole surfaces of the convex structures (101). According to the micro-nano structure in the substrate, the density of the convex structure is increased, the reflecting surface area of the convex structure is increased, and the luminous efficiency of the LED device is improved; and the patterning ratio of the C surface of the substrate is increased, so that the lateral epitaxial effect is improved, and the internal quantum efficie