Diaphragm type miniature pressure sensitive element

• Main Authors: LIU LEI, WANG GANG, CHANG YUNWEI
• Format: Patent
• Language: Chinese; English
• Published: 07.01.2022
• Subjects: MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; PHYSICS; TESTING

The utility model belongs to the field of pressure sensors, and discloses a diaphragm type miniature pressure sensitive element, which comprises a shell, an insulating part, a gold-plated Kovar tube leg, an oil filling hole sealing part, a diaphragm and a compression ring, one side of the shell is provided with a pipe leg hole and an oil filling hole, and the other side is provided with a diaphragm through hole; the insulating part fixedly sleeves one end, extending into the tube leg hole, of the gold-plated Kovar tube leg, and the gold-plated Kovar tube leg is fixedly connected with the shell through the insulating part; the oil filling hole sealing piece is in sealing connection with the oil filling hole; the diaphragm is pressed above the diaphragm through hole through a pressing ring, and the pressing ring is fixedly connected with the shell; a pressure chip and a gold wire are arranged in the shell, one end of the gold wire is connected with the pressure chip, and the other end is connected with the gold