Double-layer cooling device for semiconductor cleaning liquid medicine tank

• Main Author: BAI ZHONGHUA
• Format: Patent
• Language: Chinese; English
• Published: 22.10.2019
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

The utility model relates to a double-layer cooling device for a semiconductor cleaning liquid medicine tank. The cooling tank comprises a tank body, the tank body comprises an outer tank body and aninner tank body, the inner tank body is embedded in an inner cavity of the outer tank body, a first cooling coil is arranged around the inner side wall of the inner tank body, and a second cooling coil is arranged around the outer side wall of the inner tank body. The liquid medicine tank for etching cleaning solves the problem of quick cooling of liquid medicine in the liquid medicine tank for etching cleaning, and effectively improves the production efficiency. 本实用新型涉及一种用于半导体清洗药液槽的双层冷却装置，包括槽体，槽体包括外槽体和内槽体，内槽体嵌设在所述外槽体的内部空腔中，环绕内槽体的内侧壁的内侧设置有第一冷却盘管，环绕内槽体的外侧壁的外侧设置有第二冷却盘管。本实用新型解决了蚀刻清洗用药液槽的药液快速冷却问题，有效提高生产效率。