Prevent that flagging device of base plate from reaching base plate processing apparatus including it

• Main Authors: KIM HYUNG-DA, LEE JUN-HO, CHEONG KEE-JUNG, LEE JAE-HONG, LEE JAE-WON
• Format: Patent
• Language: Chinese; English
• Published: 22.01.2019
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

An object of the utility model is to provide a prevent that flagging device of base plate from reaching base plate processing apparatus including it when the treatment substrate, can effectively prevent can simplify the constitution that is used for preventing the flagging device of base plate simultaneously owing to the flagging phenomenon of the base plate central part that leads to through spinchuck's the rotatory centrifugal force that produces. Be used for realizing the purpose the utility model discloses a prevent that the flagging device of base plate from including: spin chuck, its supporting part that is provided with the outside portion of supporting substrate, and rotary driving carries out, the guide part, its when spin chuck was rotatory, induced air flowed. 本实用新型的目的在于提供种防止基板下垂装置及包括其的基板处理装置，在处理基板时，可以有效防止由于通过旋转夹头的旋转产生的离心力而导致的基板中央部的下垂现象，同时可以简化用于防止基板下垂的装置的构成。用于实现所述目的的本实用新型的防止基板下垂装置包括：旋转夹头，其设置有支撑基板的外侧部的支撑部，且进行旋转驱动；引导部件，其在所述旋转夹头旋转时，诱导空气流动。