Coil quick coalignment of RTP pipe end portion

The utility model relates to a coil quick coalignment of RTP pipe end portion, including lead screw flare -out subassembly and heating element, the subassembly is flare -outed including installing fixed pipe clamp seat and the portable pipe strap seat on the RTP body to the lead screw, and it is rig...

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Bibliographic Details
Main Authors ZHANG SHUYUE, LU YONG, YIN ZHENXI, ZHANG WEI, ZHANG YUPENG
Format Patent
LanguageChinese
English
Published 16.01.2018
Subjects
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