Measure and regulate bed rearrangement is examined to optical element face type

• Main Author: ZHOU QUANQUAN
• Format: Patent
• Language: English
• Published: 10.02.2016
• Subjects: MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PHYSICS; TESTING

The utility model provides a measure and regulate bed rearrangement is examined to optical element face type that can accurate positioning adjustment. Measure and regulate bed rearrangement is examined to optical element face type places the mesa including the sample, still includes the adjustment p...