Measure and regulate bed rearrangement is examined to optical element face type

• Main Author: ZHOU QUANQUAN
• Format: Patent
• Language: English
• Published: 10.02.2016
• Subjects: MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PHYSICS; TESTING

The utility model provides a measure and regulate bed rearrangement is examined to optical element face type that can accurate positioning adjustment. Measure and regulate bed rearrangement is examined to optical element face type places the mesa including the sample, still includes the adjustment platform, the sample is placed the mesa setting and is in on the adjustment platform, the adjustment platform adopts the sufficient support of three adjustment. The utility model discloses in the shape of face testing process, can not shelter from during the accommodation reflex wave face and surveyed the component, the pinpointing of disturbing reflection luminous point, the adjusting range0 is evenly controllable, and the adjustment orientation can accurately be held, and the reflection wave face can accurately correspond to produce with standard wave face and interfere, and the operation degree of difficulty is little, can accurately conveniently adjust to the accuracy that the optical element shape of face detected has been improved.