Transparent viewing window that semiconductor coating equipment reaction module was used
The utility model provides a transparent viewing window that semiconductor coating equipment reaction module was used, the observation window of is integral transparent configuration, and the high temperature process that can not only solve at existing equipment reaction cavity is the situation that...
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
09.09.2015
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Subjects | |
Online Access | Get full text |
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