Transparent viewing window that semiconductor coating equipment reaction module was used

• Main Authors: FANG SHICAI, JIANG WEI, WU FENGLI
• Format: Patent
• Language: English
• Published: 09.09.2015
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

The utility model provides a transparent viewing window that semiconductor coating equipment reaction module was used, the observation window of is integral transparent configuration, and the high temperature process that can not only solve at existing equipment reaction cavity is the situation that...