Transparent viewing window that semiconductor coating equipment reaction module was used

• Main Authors: FANG SHICAI, JIANG WEI, WU FENGLI
• Format: Patent
• Language: English
• Published: 09.09.2015
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

The utility model provides a transparent viewing window that semiconductor coating equipment reaction module was used, the observation window of is integral transparent configuration, and the high temperature process that can not only solve at existing equipment reaction cavity is the situation that can not observe, but also increased the accurate location and the interlocking triggers the function. Its structure is including big apron, plastics protection shield, plastic spacer, metal bag carriage, quartz glass and locating piece etc. Imbed sealing washer A, sealing washer B in the seal groove of above -mentioned big apron respectively, be equipped with quartz glass on the terminal surface of the big apron of embedding sealing washer, be equipped with the plastic spacer above the quartz glass, the metal bag carriage is pressed on the plastic spacer. Will be greatly the horizontal unilateral of apron and vertical unilateral install the locating piece, pass through the locating piece location with mounted apron structure at last and in reaction chamber level and vertical direction, in the contact of interlocking through lapping the bottom face greatly of reaction chamber side, can trigger the interlocking function completely, and then can observe normal atmospheric temperature and pass piece or high temperature biography piece process, perhaps to the cavity leak hunting etc. Of bleeding.