Laser atom probe methods
A laser atom probe (100) situates a counter electrode between a specimen mount and a detector (106), and provides a laser (116) having its beam (122) aligned to illuminate the specimen (104) through the aperture (110) of the counter electrode (108). The detector, specimen mount (102), and/or the cou...
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Main Authors | , |
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Format | Patent |
Language | Chinese English |
Published |
06.10.2010
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Subjects | |
Online Access | Get full text |
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