Tray for single sheet transportation

A tray for conveying a single wafer is provided to increase strength of an external frame by reducing a vertical pitch between wafers, which are stacked in the tray. A tray for conveying a single wafer includes an external frame, plural horizontal bars, and a coupling unit. The external frame includ...

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Bibliographic Details
Main Author TAHARA YOSHIYU,YOSHIMURA HIDEO,YOSHIMURA SHIGERU
Format Patent
LanguageEnglish
Published 31.01.2007
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Summary:A tray for conveying a single wafer is provided to increase strength of an external frame by reducing a vertical pitch between wafers, which are stacked in the tray. A tray for conveying a single wafer includes an external frame, plural horizontal bars, and a coupling unit. The external frame includes two long side units and two short side units. The long side units and the short side units include an outer flat unit(11) and an inner flat unit(12). The inner flat unit is formed at a position lower than that of the outer flat unit. A slant unit(13) is arranged between the outer and inner side units. A flange(14) is installed outside the outer flat unit. A height of the slant unit is determined, such that the side unit is coupled with the side unit with proper strength. Two block implementation holes(15a,15b) are formed on the long and short side units, respectively. A resin block is attached to the outer side unit through the block implementation holes. Three coupling holes are formed at an end portion of the outer side unit. A horizontal bar implementation hole(17) is formed on the inner side unit. A horizontal bar is attached to the inner side unit through the horizontal bar implementation hole.
Bibliography:Application Number: CN200610107465