FeCoNi-based medium-entropy alloy film with high thermoelectric performance and preparation method of FeCoNi-based medium-entropy alloy film

• Main Authors: JU HANG, SUN WENWEN, GAO XIAOKE, LIU CHANG, HUANG HAO, JIN XUECHENG, ZHU BEIBEI, TAO LI
• Format: Patent
• Language: Chinese; English
• Published: 28.06.2024
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

The invention discloses a FeCoNi-based medium-entropy alloy film with high thermoelectric performance and a preparation method of the FeCoNi-based medium-entropy alloy film, in the FeCoNi-based medium-entropy alloy film, the molar ratio of Fe to Co to Ni is 90: (20-60): (20-60); the thickness of the medium-entropy alloy film is 400-600 nm, the Seebeck coefficient is 300-400 [mu] V/K, and the conductivity is 104-105 S/m. The FeCoNi-based medium-entropy alloy film is prepared through the electron beam evaporation technology and annealing treatment, the obtained medium-entropy alloy film has high thermoelectric performance and excellent mechanical performance, and good adhesive force is achieved between the medium-entropy alloy film and a base body. 本发明公开了一种具有高热电性能的FeCoNi基中熵合金薄膜及其制备方法，FeCoNi基中熵合金薄膜中，Fe、Co和Ni的摩尔比为90:20-60:20-60；中熵合金薄膜的厚度为400-600nm，塞贝克系数为300-400μV/K，电导率为104-105S/m。本发明利用电子束蒸镀技术及退火处理制备出FeCoNi基中熵合金薄膜，所得中熵合金薄膜具有高热电性能和优异的力学性能，并且与基体之间具有良好的附着力。