Wafer and wafer boat box cleaning device and cleaning method thereof

• Main Authors: CHANG QIANGQIANG, HUANG CHAOLONG, LI GUANG
• Format: Patent
• Language: Chinese; English
• Published: 03.05.2024
• Subjects: BASIC ELECTRIC ELEMENTS; CLEANING; CLEANING IN GENERAL; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; PERFORMING OPERATIONS; PREVENTION OF FOULING IN GENERAL; SEMICONDUCTOR DEVICES; TRANSPORTING

The invention relates to the field of wafer and wafer boat box cleaning, in particular to a wafer and wafer boat box cleaning device and a cleaning method thereof. The wafer and wafer boat box cleaning device is used for cleaning a wafer boat box and wafers loaded in the wafer boat box, the wafer boat box is provided with a box body and a detachable box cover, and a plurality of wafers are arranged in the box body in parallel; the wafer and wafer boat box cleaning device comprises a base, a carrying assembly used for carrying a wafer boat box, a cover opening assembly used for opening a cover of the wafer boat box, a cleaning assembly used for executing cleaning operation, and a feeding station, a cover opening station and a cleaning station which are arranged corresponding to the above assemblies. Wherein the carrying assembly is clamped with the box body and carries the wafer box to move to the uncovering station; the uncovering assembly is arranged adjacent to the carrying assembly and is provided with an