Precise linear motion platform driven by external thread piezoelectric actuator and method thereof
The invention discloses a precision linear motion platform driven by an external thread piezoelectric actuator and a method thereof. The precision linear motion platform comprises a shell, a metal base, first to fourth piezoelectric ceramic pieces, a driving nut, a rolling bearing, a linear bearing,...
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Main Authors | , , , |
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Format | Patent |
Language | Chinese English |
Published |
12.04.2024
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Subjects | |
Online Access | Get full text |
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