Application of testing heating uniformity of heater of ingot furnace and method for improving silicon quality
The invention discloses application of testing heating uniformity of an ingot furnace heater and a method for improving silicon quality. Specifically, the invention discloses application of testing the heating uniformity of an ingot furnace heater in the fields of preparing a silicon ingot, and/or i...
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Main Authors | , , , , , |
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Format | Patent |
Language | Chinese English |
Published |
29.03.2024
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Subjects | |
Online Access | Get full text |
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