Metallized packaging fiber bragg grating pressure ring sensor and packaging method thereof

• Main Authors: ZHAO JINGZHAO, LIAO NAIXIONG, WEI YONGSHAN, WANG XIAOLIN, LI HUIJIAN, FANG YANQIANG, LU DI, GAN DI, NONG BOWEN, SHI HUIEN, ZHU MAOHUA, LAN YUANPEI
• Format: Patent
• Language: Chinese; English
• Published: 15.03.2024
• Subjects: MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; PHYSICS; TESTING

The invention discloses a metallized packaged fiber bragg grating pressure ring sensor and a packaging method thereof, the metallized packaged fiber bragg grating pressure ring sensor comprises a pressure ring and a fiber bragg grating, the periphery of the pressure ring is axially provided with a plurality of grooves, the plurality of grooves are circumferentially distributed along the side surface of the pressure ring, and the fiber bragg grating is packaged in the grooves through a magnetron sputtering method. A metalized layer is formed on the surface of the packaged fiber bragg grating and protrudes out of the side face of the pressure ring, the pressure ring rotates back and forth through a rotating device during packaging, and it is ensured that sputtering is uniform. The groove is filled through the magnetron sputtering method to form the metallization layer, so that the fiber bragg grating is completely covered, the metallization layer is in direct contact with the fiber bragg grating, the structure