System and method for thermally stable installation of optical column

• Main Authors: VAN DE VEN EDUARD ANTONIUS, DE JAGER PIETER WILLEM HENDRIK, WINTERS JUSTIN, VAN WERT, EDUARD, J, VAN DER LANS, MICHIEL, J
• Format: Patent
• Language: Chinese; English
• Published: 05.03.2024
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; CINEMATOGRAPHY; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS

Systems and methods for stabilizing an optical column are disclosed. A system may include: a column of optics; a frame configured to support the optical device column, the frame having a first coefficient of thermal expansion (CTE); and a sub-frame configured to be coupled to the column of optics in at least two positions through the first anchor and the second anchor to stabilize the column of optics against displacement or rotation caused by thermal expansion in the frame or the column of optics, the sub-frame having a second CTE, the second CTE being lower than the first CTE. 公开了用于使光学器件列稳定的系统和方法。一种系统可以包括：光学器件列；框架，被配置为支撑光学器件列，框架具有第一热膨胀系数(CTE)；和子框架，被配置为通过第一锚定件和第二锚定件在至少两个位置耦接到光学器件列，以使光学器件列稳定以抵抗由框架或光学器件列中的热膨胀引起的位移或旋转，子框架具有第二CTE，第二CTE低于第一CTE。