Liquid dispersions and powders of cerium-based core-shell particles, methods for their production and their use in polishing

• Main Authors: RIE, PLISONNEAU MARC, TOTH ROBERT, LE MERCIER THIERRY, BUSSET, VAL
• Format: Patent
• Language: Chinese; English
• Published: 29.12.2023
• Subjects: ADHESIVES; CHEMISTRY; DYES; MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FORELSEWHERE; METALLURGY; MISCELLANEOUS APPLICATIONS OF MATERIALS; MISCELLANEOUS COMPOSITIONS; NATURAL RESINS; PAINTS; POLISHES

The present invention relates to cerium-based core-shell particles having a core of cerium oxide optionally doped with at least one metal (M) and a shell consisting of a plurality of nanoparticles of cerium oxide optionally doped with at least one metal (M '), which may be the same as or different from the metal (M), which nanoparticles are formed on the surface of the core particle. The invention also relates to the dispersions thereof in a liquid medium, to a method for the production thereof and to the use of these particles and dispersions in polishing applications, such as chemical mechanical polishing. 本发明涉及基于铈的核-壳颗粒，其具有任选掺杂有至少一种金属(M)的氧化铈的核和由任选掺杂有可以与金属(M)相同或不同的至少一种金属(M')的氧化铈的多个纳米颗粒组成的壳，这些纳米颗粒在核颗粒的表面上形成。本发明还涉及其在液体介质中的分散体、其生产方法以及这些颗粒和分散体在抛光应用如化学机械抛光中的用途。