Tail gas purification and accident hydrogen chloride treatment system in electronic grade hydrogen chloride production process

• Main Authors: LIU GANG, CHI CHANGWEI, QIU XIAOHAO, WANG ZHIWEI, WANG ZHENHAO, MA WEI
• Format: Patent
• Language: Chinese; English
• Published: 24.11.2023
• Subjects: PERFORMING OPERATIONS; PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL; SEPARATION; TRANSPORTING

The invention relates to a tail gas purification and accident hydrogen chloride treatment system in an electronic-grade hydrogen chloride production process, which comprises a first hydrogen chloride absorption unit, a second hydrogen chloride absorption unit, a third hydrogen chloride absorption unit, a fourth hydrogen chloride absorption unit and a fifth hydrogen chloride absorption unit, wherein the first hydrogen chloride absorption unit has a primary absorption function of purifying hydrogen chloride-containing non-condensable gas intermittently discharged by a production system under a normal working condition and treating hydrogen chloride gas leaked under an accident working condition; the second hydrogen chloride absorption unit has a secondary absorption function of purifying hydrogen chloride-containing non-condensable gas intermittently discharged by the production system under a normal working condition and a secondary absorption and alkali absorption function of treating hydrogen chloride gas le