Substrate mounting table, substrate processing apparatus, and substrate processing method

• Main Authors: OGAMI KATSUYUKI, HEMMI ATSUSHI, FUKASAWA JUNICHI
• Format: Patent
• Language: Chinese; English
• Published: 19.09.2023
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

The present disclosure provides a substrate mounting table, a substrate processing apparatus, and a substrate processing method that suppress non-uniform substrate processing at a position corresponding to a lift pin. This substrate mounting table has a mounting surface on which a substrate is mounted, and is provided with: a base material; a lifting pin which is made of a conductor, ascends and descends with respect to the placement surface, has a step between an upper portion and a lower portion, and has a diameter of the upper portion larger than that of the lower portion; a pin hole which is formed inside the base material and which opens in the placement surface, and into which the lifting pin protrudes and sinks; and a holder including a through-hole through which the lifting pin passes, the holder being provided on the base material and comprising a conductor, the holder including an outer holder and an inner holder, the through-hole being formed on a central axis of the inner holder so as to enable th