Wafer bearing frame and oven

• Main Authors: HU YUANGANG, WU QIONG, LUO ZUOJUN
• Format: Patent
• Language: Chinese; English
• Published: 22.08.2023
• Subjects: BASIC ELECTRIC ELEMENTS; BLASTING; DRYING; DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; HEATING; LIGHTING; MECHANICAL ENGINEERING; SEMICONDUCTOR DEVICES; WEAPONS

The invention discloses a wafer bearing frame which comprises a main frame and a plurality of supporting sheets, the supporting sheets are stacked on the main frame in the longitudinal direction, and the wafer bearing frame further comprises an auxiliary frame. The supporting sheet comprises two embedding parts which are oppositely arranged and are in sliding connection with the main frame and a supporting part which is arranged between the two embedding parts and is used for supporting the middle part of the wafer, a notch is formed between the embedding parts and the supporting part, the auxiliary frame comprises two oppositely arranged insertion plates, the insertion plates are in sliding connection with the main frame and are located in the notch, and the insertion plates are arranged in the notch. The opposite side walls of the two inserting plates are provided with supporting bosses corresponding to the supporting pieces, and the upper surfaces of the supporting bosses and the upper surfaces of the corr