Method for preparing multicolor quantum dot array based on femtosecond laser

• Main Authors: MA QING, TAO JIN, MENG DEJIA
• Format: Patent
• Language: Chinese; English
• Published: 18.08.2023
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

The invention discloses a multicolor quantum dot array preparation method based on femtosecond laser, and belongs to the technical field of micro-nano preparation. The technical problems that according to a method for preparing a quantum dot color conversion layer in the prior art, the edge morphology of quantum dots is difficult to control, the size of a minimum pixel unit is limited, the quantum dots are prone to being wasted and damaged, and the uniformity and light conversion efficiency of quantum dot array pixels need to be improved are solved. The preparation method comprises preparation of a plurality of pixel units, and preparation of each pixel unit comprises the steps that femtosecond laser is used for machining a first array groove in the surface of black photoresist and filling the first array groove with quantum dot glue liquid, and so on until an Nth array groove is machined in the surface of the black photoresist and filling the Nth array groove with the quantum dot glue liquid, and when N is l