Baffle, splash-proof device, chemical mechanical grinding machine and grinding waste liquid splash-proof method

• Main Authors: LI CHAOYONG, QI BAOYU, SONG KAIXING, ZHANG WEI, ZHAO LIXIN, CHEN KUN, HUANG YAODONG, YUE YUXIANG
• Format: Patent
• Language: Chinese; English
• Published: 01.08.2023
• Subjects: CLEANING; CLEANING IN GENERAL; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS; GRINDING; MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; PERFORMING OPERATIONS; POLISHING; PREVENTION OF FOULING IN GENERAL; TRANSPORTING

The invention discloses a baffle, a splash-proof device, a chemical mechanical grinding machine table and a grinding waste liquid splash-proof method. The splash-proof device comprises a baffle, a cleaning stand column and a driving assembly. The baffle is arranged on the periphery of the grinding table in a surrounding mode. The baffle can be driven by the driving assembly to independently ascend and descend. The cleaning stand columns are arranged on the outer sides of the baffles, and the cleaning spray pipes of the cleaning stand columns can rotate to the inner sides of the baffles and spray liquid to clean the baffles. According to the technical scheme, the split grinding waste liquid splash-proof baffle is arranged, and lifting of the baffle can be adjusted according to the working state of the grinding pad collator in the technological process, so that splashing of waste liquid is blocked to the maximum extent. The hydrophilic area and the hydrophobic area are arranged on the surface of the baffle, and