MEMS microphone structure and preparation method thereof

The invention provides an MEMS microphone structure and a preparation method thereof, the MEMS microphone structure comprises a substrate, a vibrating diaphragm, a back pole plate, a back plate, a back pole and a vibrating diaphragm extraction electrode, the substrate is provided with a cavity penet...

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Bibliographic Details
Main Author LYU TING
Format Patent
LanguageChinese
English
Published 04.07.2023
Subjects
DEAF-AID SETS
ELECTRIC COMMUNICATION TECHNIQUE
ELECTRICITY
LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS
PUBLIC ADDRESS SYSTEMS
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