MEMS microphone structure and preparation method thereof

• Main Author: LYU TING
• Format: Patent
• Language: Chinese; English
• Published: 04.07.2023
• Subjects: DEAF-AID SETS; ELECTRIC COMMUNICATION TECHNIQUE; ELECTRICITY; LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS; PUBLIC ADDRESS SYSTEMS

The invention provides an MEMS microphone structure and a preparation method thereof, the MEMS microphone structure comprises a substrate, a vibrating diaphragm, a back pole plate, a back plate, a back pole and a vibrating diaphragm extraction electrode, the substrate is provided with a cavity penetrating through the substrate; the vibrating diaphragm is suspended above the cavity, and a wrinkle structure, an air leakage hole and a vibrating diaphragm bracket are arranged in the vibrating diaphragm; a plurality of back polar plates comprising first sound holes are suspended above the vibrating diaphragm at intervals; the back plate covers the upper surface of the back polar plate, a second sound hole, a back polar lead hole, a vibrating diaphragm lead hole and a separation layer are arranged in the back plate, the second sound hole is communicated with the first sound hole, the back polar plate is exposed out of the bottom surface of the back polar lead hole, and the vibrating diaphragm is exposed out of the